Patent Assignment
Reel/Frame 034648/0185
Assignment of Assignor's Interest
Recorded: 2015-01-06
Pages: 3
Assignors
BERRY, IVAN L., III
Executed: 2015-01-05
PARK, PILYEON
Executed: 2015-01-05
YAQOOB, FAISAL
Executed: 2015-01-05
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Isotropic Atomic Layer Etch for Silicon Oxides Using No Activation