Patent Assignment
Reel/Frame 034652/0398
Assignment of Assignor's Interest
Recorded: 2015-01-07
Pages: 8
Assignors
NASSER-GHODSI, MEHRAN
Executed: 2013-08-12
STOKOWSKI, STANLEY E.
Executed: 2013-06-12
VAEZ-IRAVANI, MEHDI
Executed: 2013-06-12
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Apparatus and Methods for Inspecting Extreme Ultra Violet Reticles