Patent Assignment
Reel/Frame 034666/0088
Assignment of Assignor's Interest
Recorded: 2015-01-08
Pages: 8
Assignors
KESHAVAMURTHY, ARUN
Executed: 2014-12-01
VAN SCHRAVENDIJK, BART
Executed: 2015-01-07
COHEN, DAVID
Executed: 2014-12-01
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Semiconductor Substrate Processing Apparatus Including Uniformity Baffles