Patent Assignment
Reel/Frame 034686/0049
Assignment of Assignor's Interest
Recorded: 2015-01-12
Pages: 3
Assignors
TAN, ZHONGKUI
Executed: 2015-01-05
FU, QIAN
Executed: 2015-01-05
HSIAO, HUAI-YU
Executed: 2015-01-05
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus for Anisotropic Tungsten Etching