Patent Assignment
Reel/Frame 034736/0736
Assignment of Assignor's Interest
Recorded: 2015-01-16
Pages: 3
Assignor
QUINTANILHA, RICHARD
Executed: 2012-06-26
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Illumination Source for Use in Inspection Methods and/or Lithography; Inspection and Lithographic Apparatus and Inspection Method