Patent Assignment
Reel/Frame 034777/0750
Assignment of Assignor's Interest
Recorded: 2015-01-21
Pages: 3
Assignor
ZAFIROPOULO, ARTHUR W.
Executed: 2015-01-16
Assignee
ULTRATECH, INC.
3050 ZANKER ROAD, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Oxygen Radical Enhanced Atomic-Layer Deposition Using Ozone Plasma