Patent Assignment
Reel/Frame 034800/0341
Assignment of Assignor's Interest
Recorded: 2015-01-23
Pages: 18
Assignor
ASML MASKTOOLS B.V.
Executed: 2013-12-20
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method, Program Product and Apparatus for Performing Double Exposure Lithography
Application:
14/563,610 →
Publication:
US 2015/0095858
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.