Assignment of Assignor's Interest

Recorded: 2015-01-23 Pages: 5

Assignors

KATO, MASAKI

Executed: 2015-01-16

KIUCHI, TOHRU

Executed: 2015-01-15

Assignee

NIKON CORPORATION

12-1, YURAKUCHO 1-CHOME, CHIYODA-KU, TOKYO, 100-8331, JAPAN

Covered Property (1)

Substrate Processing Apparatus, Processing Apparatus, and Method for Manufacturing Device

Patent: 9,651,868 →

Application: 14/387,620 →

Publication: US 2015/0241778