Patent Assignment
Reel/Frame 034813/0336
Assignment of Assignor's Interest
Recorded: 2015-01-26
Pages: 3
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Metrology Targets with Filling Elements That Reduce Inaccuracies and Maintain Contrast