Patent Assignment
Reel/Frame 034832/0192
Assignment of Assignor's Interest
Recorded: 2015-01-28
Pages: 6
Assignors
MOTOSUGI, TOMOO
Executed: 2015-01-19
OHNISHI, TAKAYUKI
Executed: 2015-01-20
TSURUTA, KAORU
Executed: 2015-01-19
OHTOSHI, KENJI
Executed: 2015-01-19
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHIN SUGITA CHO, ISOGO-KU, YOKOHAMA, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Charged Particle Beam Writing Apparatus, and Charged Particle Beam Writing Method