Patent Assignment
Reel/Frame 034855/0503
Assignment of Assignor's Interest
Recorded: 2015-01-30
Pages: 4
Assignor
YAMADA, HIROSHI
Executed: 2015-01-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Device of Contacting Substrate with Probe Card and Substrate Inspection Apparatus Having Same