Patent Assignment
Reel/Frame 034886/0513
Assignment of Assignor's Interest
Recorded: 2015-02-04
Pages: 4
Assignors
SHAIKH, FAYAZ
Executed: 2015-02-03
REDDY, SIRISH
Executed: 2015-02-03
HOLLISTER, ALICE
Executed: 2015-02-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Metal Doping of Amorphous Carbon and Silicon Films Used as Hardmasks in Substrate Processing Systems