Patent Assignment
Reel/Frame 034889/0369
Assignment of Assignor's Interest
Recorded: 2015-02-04
Pages: 5
Assignors
TAKAHASHI, NOBUYUKI
Executed: 2015-01-09
MARUYAMA, TORU
Executed: 2015-01-09
SAKUGAWA, SUGURU
Executed: 2015-01-09
Assignee
EBARA CORPORATION
1101, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Pressure Regulator and Polishing Apparatus Having the Pressure Regulator