Patent Assignment
Reel/Frame 034895/0449
Assignment of Assignor's Interest
Recorded: 2015-02-05
Pages: 5
Assignors
HAMANO, KATSUYOSHI
Executed: 2015-02-02
UMEKAWA, ATSUSHI
Executed: 2015-02-02
JODA, TAKUYA
Executed: 2015-02-02
ISHII, AKINORI
Executed: 2015-02-02
OKUNO, MASAHISA
Executed: 2015-02-02
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA, 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.