Patent Assignment
Reel/Frame 034902/0975
Assignment of Assignor's Interest
Recorded: 2015-02-06
Pages: 3
Assignee
UNIVERSITY OF MARYLAND, COLLEGE PARK
2130 MITCHELL BUILDING, COLLEGE PARK, MARYLAND, 20742
Covered Properties
(2)
Reactor for Plasma-Based Atomic Layer Etching of Materials
Reactor for Plasma-Based Atomic Layer Etching of Materials
Application:
61/913,013 →
Related Assignments
(1)
Other recorded transfers of the patents in this record — the chain of ownership.