IP Library › Patent Application 61913013
Patent Application Provisional
App. No. 61/913,013 · Confirmation No. 1038

Reactor for Plasma-Based Atomic Layer Etching of Materials

Provisional Application Expired
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 Code Description Pages PDF
2025-04-03 OATH Oath or Declaration filed 2 View
2013-12-30 APP.FILE.REC Filing Receipt 3 View
2013-12-06 TR.PROV Provisional Cover Sheet (SB16) 3 View
2013-12-06 ABST Abstract 1 View
2013-12-06 SPEC Specification 7 View
2013-12-06 DRW Drawings-only black and white line drawings 12 View
2013-12-06 APPENDIX Appendix to the specification 12 View
2013-12-06 WFEE Fee Worksheet (SB06) 2 View
2013-12-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/913,013
Filed
2013-12-06