Patent Assignment
Reel/Frame 034934/0418
Assignment of Assignor's Interest
Recorded: 2015-02-11
Pages: 4
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Apparatus and Method for Correlating Images of a Photolithographic Mask
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.