Patent Assignment
Reel/Frame 034937/0740
Assignment of Assignor's Interest
Recorded: 2015-02-11
Pages: 6
Assignors
CHEN, LEE
Executed: 2015-02-09
VENTZEK, PETER L.G.
Executed: 2015-01-30
LANE, BARTON G.
Executed: 2015-02-09
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
System and Method for Controlling Plasma Density