Patent Assignment
Reel/Frame 034941/0607
Assignment of Assignor's Interest
Recorded: 2015-02-11
Pages: 4
Assignors
HENRI, JON
Executed: 2014-12-03
HAUSMANN, DENNIS M.
Executed: 2014-12-05
VAN SCHRAVENDIJK, BART J.
Executed: 2014-12-03
TANG, SHANE
Executed: 2014-12-03
LEESER, KARL F.
Executed: 2014-12-08
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Selective Inhibition in Atomic Layer Deposition of Silicon-Containing Films