Patent Assignment
Reel/Frame 034944/0711
Assignment of Assignor's Interest
Recorded: 2015-02-12
Pages: 4
Assignors
VAN DER SCHAAR, MAURITS
Executed: 2012-03-01
WARNAAR, PATRICK
Executed: 2012-03-01
BHATTACHARYYA, KAUSTUVE
Executed: 2012-03-01
SMILDE, HENDRIK JAN HIDDE
Executed: 2012-03-01
KUBIS, MICHAEL
Executed: 2012-03-01
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Substrate and Patterning Device for Use in Metrology, Metrology Method and Device Manufacturing Method