Patent Assignment
Reel/Frame 034951/0398
Assignment of Assignor's Interest
Recorded: 2015-02-12
Pages: 6
Assignors
BURKHARDT, MARTIN
Executed: 2015-02-02
GALLAGHER, EMILY ELIZABETH, FISCH
Executed: 2015-02-02
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Structure and Method for Fixing Phase Effects on Euv Mask