Patent Assignment
Reel/Frame 034958/0287
Assignment of Assignor's Interest
Recorded: 2015-02-13
Pages: 3
Assignors
YUN, SUN JIN
Executed: 2015-01-31
LEE, KYU SUNG
Executed: 2015-02-02
LIM, JUNGWOOK
Executed: 2015-02-02
Assignee
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
161, GAJEONG-DONG, YUSEONG-GU, DAEJEON, 305-700, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus for Monitoring Gas and Plasma Process Equipment Including the Same