Patent Assignment
Reel/Frame 034958/0897
Assignment of Assignor's Interest
Recorded: 2015-02-13
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Editing Apparatus and Method and Non-Transitory Storage Medium