Assignment of Assignor's Interest

Recorded: 2015-02-13 Pages: 7

Assignors

KAMEDA, KENJI

Executed: 2015-02-12

YAMAMOTO, RYUJI

Executed: 2015-02-13

URANO, YUJI

Executed: 2015-02-12

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN

Covered Property (1)

Cleaning Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium

Patent: 9,587,308 →

Application: 14/622,115 →

Publication: US 2015/0232986

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.