Patent Assignment
Reel/Frame 034973/0536
Assignment of Assignor's Interest
Recorded: 2015-02-17
Pages: 3
Assignor
DEVILLIERS, ANTON J.
Executed: 2015-02-13
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Patterning a Substrate for Planarization