Patent Assignment
Reel/Frame 035002/0242
Assignment of Assignor's Interest
Recorded: 2015-02-23
Pages: 4
Assignor
LEESER, KARL
Executed: 2015-02-19
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Compact Substrate Processing Tool with Multi-Station Processing and Pre-Processing and/or Post-Processing Stations