Patent Assignment
Reel/Frame 035024/0557
Assignment of Assignor's Interest
Recorded: 2015-02-25
Pages: 3
Assignors
YOSHIDA, RYOICHI
Executed: 2015-02-19
MURAKAMI, HIRAKU
Executed: 2015-02-19
SASAKI, NOBUTAKA
Executed: 2015-02-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method for Processing Object