Patent Assignment
Reel/Frame 035031/0650
Assignment of Assignor's Interest
Recorded: 2015-02-25
Pages: 3
Assignee
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
77 MASSACHUSETTS AVENUE, CAMBRIDGE, MASSACHUSETTS, 02139
Covered Property
(1)
Method and Apparatus for Controlling Film Deposition
Application:
13/738,710 →
Publication:
US 2013/0208041
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.