Patent Assignment
Reel/Frame 035653/0802
Confirmatory License
Recorded: 2015-05-13
Pages: 2
Assignor
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Executed: 2013-03-19
Assignee
NATIONAL SCIENCE FOUNDATION
4201 WILSON BLVD, ROOM 1265, ARLINGTON, VIRGINIA, 22230
Covered Property
(1)
Method and Apparatus for Controlling Film Deposition
Application:
13/738,710 →
Publication:
US 2013/0208041
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 18, 2015
From: BULOVIC, VLADIMIR; SCHMIDT, MARTIN A.
To: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Reel/Frame 034977/0990 →
Assignment of Assignor's Interest
Feb 25, 2015
From: CHEN, JIANGLONG; MADIGAN, CONOR F.
To: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Reel/Frame 035031/0650 →