Patent Assignment
Reel/Frame 035039/0568
Assignment of Assignor's Interest
Recorded: 2015-02-26
Pages: 4
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Process for Manufacturing Resist Composition and Patterning Process