Patent Assignment
Reel/Frame 035041/0922
Assignment of Assignor's Interest
Recorded: 2015-02-26
Pages: 4
Assignors
YOSHIHARA, NAOHIKO
Executed: 2015-02-17
KOBAYASHI, KENJI
Executed: 2015-02-18
OKUTANI, MANABU
Executed: 2015-02-18
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method