Patent Assignment
Reel/Frame 035049/0901
Assignment of Assignor's Interest
Recorded: 2015-02-27
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method and Memory Medium