Assignment of Assignor's Interest

Recorded: 2015-03-02 Pages: 7

Assignors

YAMAMOTO, RYUJI

Executed: 2015-02-25

HIROSE, YOSHIRO

Executed: 2015-02-24

SHIMAMOTO, SATOSHI

Executed: 2015-02-24

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN

Covered Property (1)

Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium

Patent: 9,613,798 →

Application: 14/634,280 →

Publication: US 2015/0255274

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.