Patent Assignment
Reel/Frame 035069/0369
Assignment of Assignor's Interest
Recorded: 2015-03-02
Pages: 2
Assignors
TERAUCHI, HIROMITSU
Executed: 2015-02-02
IIDA, TSUTOMU
Executed: 2015-02-02
YAMAMOTO, KOICHI
Executed: 2015-02-02
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.