Patent Assignment
Reel/Frame 035070/0386
Assignment of Assignor's Interest
Recorded: 2015-03-02
Pages: 2
Assignors
MARAKHTANOV, ALEXEI
Executed: 2015-03-02
KOZAKEVICH, FELIX
Executed: 2015-03-02
HOLLAND, JOHN PATRICK
Executed: 2015-03-02
JACOBS, BRETT
Executed: 2015-03-02
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Impedance Matching Circuit for Operation with a Kilohertz Rf Generator and a Megahertz Rf Generator to Control Plasma Processes