Patent Assignment
Reel/Frame 035072/0393
Assignment of Assignor's Interest
Recorded: 2015-03-03
Pages: 2
Assignors
ASAKURA, RYOJI
Executed: 2015-01-28
TAMAKI, KENJI
Executed: 2015-01-28
KAGOSHIMA, AKIRA
Executed: 2015-01-26
SHIRAISHI, DAISUKE
Executed: 2015-01-26
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Data Analysis Method for Plasma Processing Apparatus, Plasma Processing Method and Plasma Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.