Patent Assignment
Reel/Frame 035074/0213
Assignment of Assignor's Interest
Recorded: 2015-03-03
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
METHOD OF ENHANCING HIGH-k FILM NUCLEATION RATE AND ELECTRICAL MOBILITY IN A SEMICONDUCTOR DEVICE BY MICROWAVE PLASMA TREATMENT