Patent Assignment
Reel/Frame 035078/0342
Assignment of Assignor's Interest
Recorded: 2015-03-03
Pages: 4
Assignors
CARCASI, MICHAEL A.
Executed: 2015-02-26
HOOGE, JOSHUA S.
Executed: 2015-03-02
RATHSACK, BENJAMEN M.
Executed: 2015-02-26
NAGAHARA, SEIJI
Executed: 2015-02-25
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods and Techniques to Use with Photosensitized Chemically Amplified Resist Chemicals and Processes