Patent Assignment
Reel/Frame 035092/0762
Assignment of Assignor's Interest
Recorded: 2015-03-05
Pages: 8
Assignors
SCHEER, STEVEN
Executed: 2015-03-03
CARCASI, MICHAEL A.
Executed: 2015-02-26
RATHSACK, BENJAMEN M.
Executed: 2015-02-26
SOMERVELL, MARK H.
Executed: 2015-03-05
HOOGE, JOSHUA S.
Executed: 2015-03-02
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Chemical Amplification Methods and Techniques for Developable Bottom Anti-Reflective Coatings and Dyed Implant Resists