Patent Assignment
Reel/Frame 035093/0858
Assignment of Assignor's Interest
Recorded: 2015-03-05
Pages: 2
Assignor
PANDEV, STILIAN IVANOV
Executed: 2015-02-17
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Signal Response Metrology For Image Based Overlay Measurements