Patent Assignment
Reel/Frame 035100/0593
Assignment of Assignor's Interest
Recorded: 2015-03-06
Pages: 3
Assignor
DHAS, ARUL N.
Executed: 2015-02-05
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus to Minimize Seam Effect During Teos Oxide Film Deposition