Patent Assignment
Reel/Frame 035106/0805
Assignment of Assignor's Interest
Recorded: 2015-03-06
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Pretreatment of Nickel and Cobalt Liners for Electrodeposition of Copper into Through Silicon Vias