Patent Assignment
Reel/Frame 035111/0889
Assignment of Assignor's Interest
Recorded: 2015-03-09
Pages: 6
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Method and Apparatus for Conditioning Polishing Pad