Patent Assignment
Reel/Frame 035123/0897
Assignment of Assignor's Interest
Recorded: 2015-03-10
Pages: 3
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method for Discharge of Processing Liquid from Nozzle
Application:
14/642,919 →
Publication:
US 2015/0262848