Patent Assignment
Reel/Frame 035131/0863
Assignment of Assignor's Interest
Recorded: 2015-03-10
Pages: 5
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Polysilicon Over-Etch Using Hydrogen Diluted Plasma for Three-Dimensional Gate Etch