Patent Assignment
Reel/Frame 035137/0445
Assignment of Assignor's Interest
Recorded: 2015-03-11
Pages: 3
Assignors
MITSUOKA, KAZUYUKI
Executed: 2015-03-06
OHNO, HIROKI
Executed: 2015-02-26
ORII, TAKEHIKO
Executed: 2015-03-04
TOSHIMA, TAKAYUKI
Executed: 2015-03-02
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Separation and Regeneration Apparatus and Substrate Processing Apparatus