Patent Assignment
Reel/Frame 035143/0198
Assignment of Assignor's Interest
Recorded: 2015-03-11
Pages: 4
Assignors
SHIH, CHIH-TSUNG
Executed: 2015-01-23
YU, SHINN-SHENG
Executed: 2015-01-23
CHEN, JENG-HORNG
Executed: 2015-01-23
YEN, ANTHONY
Executed: 2015-01-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method for Integrated Circuit Patterning
Application:
14/645,047 →
Publication:
US 2016/0064239