Patent Assignment
Reel/Frame 035144/0507
Assignment of Assignor's Interest
Recorded: 2015-03-11
Pages: 6
Assignors
LEE, SANG IN
Executed: 2015-03-09
PAK, SAMUEL S.
Executed: 2015-03-10
LEE, DANIEL HO
Executed: 2015-03-10
YANG, HYOSEOK DANIEL
Executed: 2015-03-10
Assignee
VEECO ALD INC.
3191 LAURELVIEW COURT, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Cleaning of Deposition Device by Injecting Cleaning Gas into Deposition Device