Patent Assignment
Reel/Frame 035150/0571
Assignment of Assignor's Interest
Recorded: 2015-03-12
Pages: 7
Assignors
HUANG, JIAN-SHIOU
Executed: 2015-03-09
TSAI, CHENG-YUAN
Executed: 2015-03-09
CHANG, YAO-WEN
Executed: 2015-03-09
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Bottom Electrode Structure for Improved Electric Field Uniformity