Patent Assignment
Reel/Frame 035192/0110
Assignment of Assignor's Interest
Recorded: 2015-03-18
Pages: 6
Assignors
CHAE, SOO DOO
Executed: 2015-03-12
CHANG, YOUNGDON
Executed: 2015-03-18
SONG, IL-SEOK
Executed: 2015-03-18
RUSSELL, NOEL
Executed: 2015-03-12
Assignee
TEL EPION, INC.
900 MIDDLESEX TURNPIKE, BLDG. 6, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Sidewall Spacer Patterning Method Using Gas Cluster Ion Beam
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.